Precision lapping of diamond sensor.
نویسندگان
چکیده
منابع مشابه
An Investigation on Two Types of Crystalline Micro-diamond Film Coated Tools Lapping with Sapphire Wafer
Two types of micron-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition(HFCVD) method. Morphology and orientation of crystalline growth were evaluated by SEM and XRD. Diamond film coated tools and sapphire wafer’ surface before and after lapping experiment were contrasted. The results indicated that a significant change in Raman spectrum of two types of micro...
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Precision Engineering
سال: 1985
ISSN: 0374-3543
DOI: 10.2493/jjspe1933.51.1684